Product Description
MKS Instruments Elastomer-Sealed Mass Flow Controller for Nitrogen Gas, 1559A-22518
PN: 1559A-22518
- Fluid Compatibility: Configured for N2 gas
- Flow Rate: 400 SLM (standard liters per minute)
- Accuracy: ±1.0% of Full Scale (for N2)
- Control Valve: Features a unique "balanced force" solenoid valve design to eliminate oscillation and provide a better response time
- Wetted Materials: Include 316L Stainless Steel, Inconel®, Nickel, Elgiloy®, and Viton®
- Interface: Analog 15-pin D male connector
- Operating Temperature: 15 to 50°C (59 to 122°F)
