Product Description
MKS 901P-11030-0108 Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS232
P/N: 901P-11030-0108
AFC P/N: 68378
- Absolute Measurement Range: 1.0 x 10-5 to 1500 Torr
- Differential Measurement Range: -760 to +760 Torr
- Digital Communication: RS232
- Type: Vacuum Transducer
- Sensor: MicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)
- Display: No
- Seal Material: Viton
- Enclosure: Standard
- Electrical Connector: 15-pin, High Density, D-sub male
- Interface: RS232/analog
- Relays: 3
- Fitting Type: NW16 ISO-KF
- Installation Orientation: Any
- Set Point Range: Absolute: 5.0 x 10-4 Torr to 1000 Torr. Differential: -760 to 100 Torr
- Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
- Operating Temperature: 0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature: 85°C (185°F)
- Digital Controls: Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital Status: Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output: 1-9 VDC (1 VDC per Decade)
- Analog Output Resolution: 16 bit
- Optional Analog Output: 25 VDC = 0 Torr, 1 VDC/decade (Piezo Differential)
- Relay Contact Rating: 1 A @ 30VAC/DC, resistive
- Relay Response: 100 msec maximum
- Power Requirements: 9 - 30 VDC, <1.2 Watts maximum
- MicroPirani Accuracy: 5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
- MicroPirani Repeatability: 1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy: -10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
- Piezo Differential Repeatability: -760 to 10 Torr ±1% of Reading
- Piezo Differential Zero Stability: ±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit: 1500 Torr (absolute)
- Exposed Materials: Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
- Electronic Casing and Flange: 304 stainless steel
- Compliance: CE
- Analog Output 2 Resolution: 12 bit
- Digital Baud Rates: 4800 - 230400 Baud
